Newport Corporation | Motorized Positioning | Custom-Motion-Systems | HybrYX-Single-Plane-XY-Hybrid-Air-Bearing-Stage

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Home > Products > Motorized Positioning > Custom Motion Systems > HybrYX^TM Single Plane XY Hybrid Air Bearing Stage

HybrYX^TM Single Plane XY Hybrid Air Bearing Stage

HybrYX<sup>TM</sup> Single Plane XY Hybrid Air Bearing Stage

Ideal choice for scanning applications requiring ultra-low velocity ripple and dynamic following error.
True single plane XY architecture with optional theta and Z-Tip-Tilt solutions.
Extensive use of advanced ceramic materials provides lightweight, rigid, and a well damped structure.
Large XY travel range (>1 meter).
Scanning velocity up to 600mm/sec and 0.6G acceleration.

Product Description Product Detail Specifications Drawings Catalog PDF

Product Description

The all-new HybrYX^TM single plane XY hybrid stage is the latest addition to Newport’s family of air bearing products offering the advantages of a single plane air bearing stage at a much lower cost than previously possible. The HybrYX stage is well suited for semiconductor wafer inspection systems and emerging maskless lithography applications. The stage is also an excellent choice for use in flat panel display (FPD) inspection and processing tools

Model	Description
HybrYX^TM	Single Plane XY Hybrid Air Bearing Stage
Chuck	Chuck, f300mm
ND40-A	Vibration Isolation

Contact MotionSystems@newport.com or call 1-(800) 222 6440 to discuss your HybrYX system needs.

Founded in 1969, Newport is a pioneering single-source solutions provider of laser and photonics components to the leaders in scientific research, life and health sciences, microelectronics, industrial manufacturing, and homeland security markets.