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The all-new HybrYXTM single plane XY hybrid stage is the latest addition to Newport’s family of air bearing products offering the advantages of a single plane air bearing stage at a much lower cost than previously possible. The HybrYX stage is well suited for semiconductor wafer inspection systems and emerging maskless lithography applications. The stage is also an excellent choice for use in flat panel display (FPD) inspection and processing tools |
Innovative Architecture |
The HybrYX stage blends the cost advantage of mechanical bearings with the precision of a single plane air bearing carriage to deliver a powerful combination of throughput, precision and value. During motion, a ceramic carriage slides freely in X and Y on a precision lapped granite reference plane using a proprietary pressure-vacuum air bearing design. This carriage is guided along the Y-axis, using pressure-vacuum air bearings, by a rigid and lightweight ceramic beam. This ceramic beam is in turn supported at each end by recirculating ball bearing carriages and guided along the X-axis by linear rails. This results in a low-profile design that is extremely rigid, well-damped, and capable of quick & precise point-to-point moves and exceptional high-speed scanning performance. |
Linear Motor Drives |
Typically used as the “stepping” axis, the X-axis is driven by a pair of iron-core linear motors, one motor on each end of the ceramic beam. These linear motors were selected for their high efficiency and torque. To optimize scanning performance, an ironless linear motor drives the Y-axis through the CG of the single plane carriage. |
Performance without Compromise |
HybrYX was developed to overcome the disadvantages found in conventional “stacked” XY stage systems. Truck-and-rail based stages have limited performance capabilities, long-travel crossed roller bearing designs are hindered by large footprints and may not have adequate life-time or MTBF characteristics, and a pure, dual axis air bearing is often cost prohibitive. The unique hybrid architecture of HybrYX addresses all of these typical drawbacks and offers the following outstanding performance characteristics for demanding scanning applications: |
Z-jitter & dynamic straightness of less than ±25nm during high speed motion- Better than 0.1% Velocity ripple
- Compact 1200mm by 765mm footprint (with standard 650mm by 350mm travel range)
- Long-life & High MTBF (air bearing is not limited by bearing travel/life-expectancy)
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Motion Controller |
The XPS motion controller is recommended for optimized performance and ease of integration with the HybrYX stage. The XPS is a standalone motion controller in a 19in (4U) chassis capable of controlling and driving up to 8 axes of brushless linear/rotary, brushed-DC, and stepping motors. HybrYX utilizes three axes, leaving room for control of other motion devices. With all controller, interpolator, amplifier, and power supply components housed within the XPS, cable management from the single cable exit of the HybrYX stage is clean and efficient. XPS supports a wide range of powerful motion control features including: |
High-speed 10/100 Base-T Ethernet communication interface- Advanced 10KHz servo loop with variable PID’s, low-pass & notch filters, and feedforward compensation
- Sophisticated 3D error mapping and linear error compensation
- Extensive I/O functionality including low-latency position compare output and input latching
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Options and Accessories |
XPS Motion Controller (see Universal High-Performance Motion Controller/Driver) |
Powerful standalone controller and driver- Controls and drives up to 8 axes
- Precise position and event synchronization
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NewDampTM Constant Natural Frequency Vibration Isolators |
Cost effective vibration isolation- Compact solution that is simple to integrate
- Exceptional damping characteristics
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Reaction Force Compensation System |
Enhances the settling performance of NewDamp isolators at a low incremental cost- Provides settling performance comparable to higher-cost active isolation systems
- Easy to integrate, requires no position feedback or other sensors
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Z-Tip-Tilt |
Integrated low-profile architecture- Models with voice-coil and linear actuator drives depending on required performance
- Vertical travel from 4mm to 10mm
- Angular (Tip & Tilt) travel from 1 milliradian to 1 degree
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Theta options |
Integrated with Z-Tip-Tilt or standalone Theta-Z- Air bearing or mechanical bearing designs
- Models with piezo, voice-coil, and linear actuator drives depending on required performance
- Up to ±3 degree travel range
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Bridge Structures |
Available in Granite or Silicon Carbide (SiC) designs- Customized mounting holes and precision reference surfaces
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Pneumatics Panel |
Single pressure source input- Includes regulators, filters, vacuum generators (venturi), and safety interlocks
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