Product Description
The all-new HybrYXTM single plane XY hybrid stage is the latest addition to Newport’s family of air bearing products offering the advantages of a single plane air bearing stage at a much lower cost than previously possible. The HybrYX stage is well suited for semiconductor wafer inspection systems and emerging maskless lithography applications. The stage is also an excellent choice for use in flat panel display (FPD) inspection and processing tools
The all-new HybrYXTM single plane XY hybrid stage is the latest addition to Newport’s family of air bearing products offering the advantages of a single plane air bearing stage at a much lower cost than previously possible. The HybrYX stage is well suited for semiconductor wafer inspection systems and emerging maskless lithography applications. The stage is also an excellent choice for use in flat panel display (FPD) inspection and processing tools