The unique hybrid architecture of HybrYX G5 offers the following outstanding performance characteristics for demanding large payload applications:
- Design is closely based on smaller HybrYX stage but with larger ceramic carriage and Y-axis guide beam
- Large, 1400mm travel in the Y (scanning) axis is well suited for up to Generation 5 flat panel display substrates or photovoltaic panels
- Capable of providing ±3µm accuracy over a full XY travel range of 1400mm by 400mm
- Long-life & high MTBF as air bearing is not limited by bearing travel/life-expectancy
- Optional Z-Tip-Tilt and Theta functionality without significant increase to mass and profile (height)
Innovative Architecture
HybrYX stages blend the cost-effectiveness of mechanical bearings with the precision of a single plane air bearing carriage to deliver a powerful combination of throughput, precision and value. During motion, a ceramic carriage freely slides in X and Y on a precision lapped granite reference plane using a proprietary pressure-vacuum air bearing design. This XY carriage is pressure-vacuum preloaded to, and guided along the Y-axis by a rigid and lightweight ceramic beam. The beam is supported (and guided) at each end by recirculating ball bearing carriages resulting in a low-profile design that is extremely rigid, well-damped, and capable of quick & precise point-to-point moves and exceptional high-speed scanning performance. For large payloads, such as Generation-5 LCD display or Photovoltaic panels, the HybrYX-G5 offers an oversized carriage with higher air bearing load capacity on both the horizontal and vertical reference surfaces.
Performance without Compromise
HybrYX was developed to overcome the disadvantages found in conventional “stacked” XY stage systems. Truck-and-rail based stages have limited performance capabilities, long-travel crossed roller bearing designs are hindered by large footprints and may not have adequate life-time or MTBF characteristics, and a (pure) dual axis air bearing is often cost prohibitive.
Features and Benefits
Newport’s HybrYX stages offer unique advantages and a robust feature set that includes:
- Excellent price-to-performance value for demanding industrial OEM applications
- Ideal choice for scanning applications requiring ultra-low velocity ripple and dynamic following error
- True single place XY architecture with optional theta and Z-Tip-Tilt solutions
- Reliable, long-life operation well suited for high duty cycle environments
- Large (>1 meter) XY Travel range
- Scanning velocities up to 600mm/sec and 0.6G acceleration
They HybrYX™ G5 Large Substrate Positioning Stage is ideal for a wide range of applications including:
- PCB Patterning
- Automated Optical Inspection
- Array Checking
- Array Repair
- Color Filter Generation
- Edge Isolation
- Scribing
- Fiducial and Barcode Generation
- Wave Guide Direct Writing
- Optical Calibration
| Design Details |
HybrYX G5 |
| Stage Architecture |
Single Plane XY Air Bearing / Mechanical Bearing Hybrid |
| Material |
Ceramic (SiC), Granite |
| Drive Mechanism |
Brushless linear servo motor (Y-axis Ironless, X-axis Iron-core) |
| Position Feedback |
Non-contact optical linear encoders
- Standard: Heidenhain LIDA, steel scale with 20 µm signal period
- Optional: Heidenhain LIF, glass scale with 4 µm signal period
- Optional: Renishaw Signum, Invar scale with 20 µm signal period |
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| Bearings |
Pressure-Vacuum Air Bearing (XY Carriage and Y-travel), Recirculating ball-bearing (X-travel) |
| Cable Management |
Fully integrated, clean-room compatible, single point exit/entry, mimimal external force |
| General Specifications |
|
| Travel Range (standard) |
450 mm X-axis |
| 1400 mm Y-axis |
| Footprint (without bridge pillars) |
2000 mm x 900 mm x 450 mm (with ZTT & Theta) |
| Rated Payload (maintains dynamic specifications) |
30 kg on ZTT & Theta |
| Maximum Load Capacity |
40 kg (without ZTT & Theta) |
| Maximum Velocity (rated payload) |
300 mm/sec X-axis (stepping) |
| 600 mm/sec Y-axis (scanning) |
| Peak Acceleration (rated payload) |
0.15 G X-axis with ZTT & Theta |
| 0.25 G X-axis with ZTT & Theta |
| RMS Acceleration (rated payload) |
0.075 G X-axis with ZTT & Theta |
| 0.1 G X-axis with ZTT & Theta |
| Granite Base Thickness |
250 mm |
| Total Weight |
1400 kg |
| Stiffness, First Natural Frequency |
150 Hz |
| MTBF |
20,000 hrs. |
| Performance Specifications |
|
| Pitch, Yaw, Roll (300 mm by 600 mm travel) |
<15 µrad |
| Y-axis Straightness (300 mm line) |
1 µm TIR |
| Y-axis Straightness (25 mm line) |
0.15 µm TIR |
| Noise on Y-axis Straightness (sampled at >5 Hz.) |
±25 nm |
| XY Flatness (300mm circle) |
0.6 µm TIR |
| Y-axis Position Accuracy over 25 mm |
± 100 nm with 20 µm with Invar scale |
| Accuracy in XY (with linear and perpendicularity error compensation) |
± 3 µm over 1.2 m x 0.4 m with 20 µm Invar Scale |
| Noise on XY Flatness (sampled at > 5Hz) |
±25 nm |
| XY Orthogonality |
< 20 µrad |
| Y-axis Speed Stability (velocity ripple sampled at 2kHz and 400mm/sec) |
0.1% |
| Step-and-Settle Times (using ND40 Passive Isolators) |
Settling into ±1 µm window
Note: Addition of Reaction Force Compensation System allows same step-and-settle times into ± 0.25 µm window |
| 300 mm step |
< 1350 msec X-axis |
| < 900 msec Y-axis |
| 100 mm step |
< 750 msec X-axis |
| < 500 msec Y-axis |
| 25 mm step |
< 350 msec X-axis |
| < 300 msec X-axis |
| Ideal Interpolated Encoder Resolution |
2 nm |