High-Energy Excimer Laser Mirrors

Low loss dielectric coatings
High damage threshold
0° or 45° incidence angle

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Designed for the most demanding UV applications, our high-energy excimer laser mirrors have low loss dielectric coatings to minimize scatter and maximize reflected energy. UV grade fused silica substrates polished to λ/10 flatness preserve wavefront quality and maintain stability.

We offer excimer mirrors for ArF (193 nm), KrF (248 nm), XeCl (308 nm), and XeF (351–353 nm) lasers at either 0° or 45° angle of incidence. Reflectivity at 193 nm is greater than 98% for 0° incidence mirrors and greater than 95% for 45° incidence mirrors. Reflectivity at 248, 308, and 351–353 nm is greater than 99% for either 0° or 45° incidence mirrors. Both 25.4 or 50.8 mm diameter mirrors are available.

Specifications

Material	UV grade fused silica
Surface Flatness S₁	≤λ/10 at 632.8 nm over the clear aperture
Clear Aperture	≥central 80% of diameter
Surface Quality	10-5 scratch-dig
Diameter Tolerance	+0/-0.25 mm
Thickness Tolerance	±0.5 mm
Wedge	≤3 arc min
Chamfers	1.0 (25.4) [in. (mm)]: 0.25–0.76 mm face width x 45° ±15° 2.0 (50.8) [in. (mm)]: 0.38–1.14 mm face width x 45° ±15°
Durability	MIL-C-675C adhesion and abrasion, MIL-C-14806
Cleaning	Non-abrasive method, acetone or isopropyl alcohol on lens tissue recommended (see Care and Cleaning of Optics)
Damage Threshold	1 MW/cm² CW, 1 J/cm² with 10 nsec pulses at the center wavelength, typical

Coatings

Laser Type	Wavelength (nm)	Angle of Incidence	Reflectivity	Coating Code
ArF	193	0°	R>98%	EM.40
KrF	248	0°	R>99%	EM.10
XeCl	308	0°	R>99%	EM.20
XeF	351–353	0°	R>99%	EM.30
ArF	193	45°	R_unpol >95%	EM.45
KrF	248	45°	R_s, R_p >99%	EM.15
XeCl	308	45°	R_s, R_p >99%	EM.25
XeF	351–353	45°	R_s, R_p >99%	EM.35

Model	Description	avail raw	Availability	price raw	Price	Qty. MULTI ADD
10QM20EM.10	High Energy Excimer Laser Mirror, 25.4 mm Diameter, 6.35 mm, 0°, 248nm	9	9 Weeks	487	$487.00	ADD
10QM20EM.15	High Energy Excimer Laser Mirror, 25.4 mm Diameter, 6.35 mm, 45°, 248nm	9	9 Weeks	355	$355.00	ADD
10QM20EM.20	High Energy Excimer Laser Mirror, 25.4 mm Diameter, 6.35 mm, 0°, 308nm	9	9 Weeks	487	$487.00	ADD
10QM20EM.25	High Energy Excimer Laser Mirror, 25.4 mm Diameter, 6.35 mm, 45°, 308nm	0	In Stock	423	$423.00	ADD
10QM20EM.30	High Energy Excimer Laser Mirror, 25.4 mm Diameter, 6.35 mm, 0°, 351-353nm	0	In Stock	487	$487.00	ADD
10QM20EM.35	High Energy Excimer Laser Mirror, 25.4 mm Diameter, 6.35 mm , 45°, 351-353nm	0	In Stock	405	$405.00	ADD
10QM20EM.40	High Energy Excimer Laser Mirror, 25.4 mm Diameter, 6.35 mm, 0°, 193nm	9	9 Weeks	555	$555.00	ADD
10QM20EM.45	High Energy Excimer Laser Mirror, 25.4 mm Diameter, 6.35 mm, 45°, 193nm	0	In Stock	459	$459.00	ADD
20QM20EM.15	High Energy Excimer Laser Mirror, 50.8 mm Diameter, 9.53 mm, 45°, 248nm	0	In Stock	536	$536.00	ADD
20QM20EM.25	High Energy Excimer Laser Mirror, 50.8 mm Diameter, 9.53 mm, 45°, 308nm	0	In Stock	639	$639.00	ADD
20QM20EM.35	High Energy Excimer Laser Mirror, 50.8 mm Diameter, 9.53 mm, 45°, 351-353nm	9	9 Weeks	667	$667.00	ADD
20QM20EM.45	High Energy Excimer Laser Mirror, 50.8 mm Diameter, 9.53 mm, 45°, 193nm	9	9 Weeks	709	$709.00	ADD
5106	UV Turning Mirror, 1.0 in. Diameter, 363 nm, UV Fused Silica	0	In Stock	319	$319.00	ADD
5128	UV Turning Mirror, 2.0 in. Diameter, 248 nm, UV Fused Silica	0	In Stock	319	$319.00	ADD
5129	UV Turning Mirror, 2.0 in. Diameter, 193 nm, UV Fused Silica	0	In Stock	369	$369.00	ADD
5136	UV Turning Mirror, 1.5 in. Diameter, 363 nm, UV Fused Silica	99	Call	369	$369.00	ADD

Model	Dimension (mm)
Model	øA	øB	C
10QM20	25.4	20.3	6.35
20QM20	50.8	40.6	9.53

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High-Energy Excimer Laser Mirrors

Specifications

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