|
Newport Heavy Load OEM Isolators provide unsurpassed pneumatic vibration isolation for platform loads up to 5 tons. Featuring Newport’s unique Stabilizer™ hybrid chamber design, these isolators offer the largest compliance volume and, therefore, best vertical isolation of any isolators in this size range. For machinery with moving loads, Damping isolators provide high damping and fast settling with very little compromise of isolation properties. Each heavy load isolator also incorporates Newport’s patented self-centering design to ease manufacturing integration into OEM machinery. Wide selection and modular design capability provide the greatest flexibility to precision machinery designers.
Since isolation is best achieved at full rated load, three distinct heavy load diaphragm designs are offered. When integrated into 3 or 4 leg systems, the Heavy Load OEM Series enables the engineer to optimize the system by selecting from a range of six full load capacities. Also available are a variety of valves and damping mechanisms to further tune the system to specific machine needs. Eighteen standard configurations are listed — countless more are available though Newport’s Custom Products Engineering Group. |
High-Resolution Systems — “A” Series Stabilizer™ Isolators |
In many high-resolution systems, such as Steppers, SEMs and Mask Inspection Machines, very low-level vibration noise is the ultimate limitation. The “A” Series Heavy Load Isolators offer the same advanced hybrid chamber technology developed for the research grade I-2000 isolators. The vibration isolation provided by this system is unsurpassed for this size range of pneumatic isolator. The “A” Series is the best choice for most high-resolution applications. |
High Throughput Systems — “B” Series Damping Isolators |
Building on Newport’s unique Stabilizer technology, “B” Series Damping Isolators offer increased damping and reduced platform-settling time. The “B” Series should be selected for high-resolution systems with increased requirement for releveling speed and stability as loads are moved across the platform.
Damping isolators incorporate high gain valves and constrict the airflow through damping element by 50%. Custom Damping designs can be tuned for specific isolation and moving load requirements. |
Applications |
Semiconductor Equipment |
Wafer Steppers- Mask and Reticule Inspection
- SEMs/TEMs
- Optical Inspection
|
Data Storage Equipment |
CD/DVD Mastering- Optical Inspection
|
High Throughput Systems — “C” Series with Horizontal Damping |
Systems with high acceleration horizontal loads require increased isolator damping. Based on Newport’s long experience manufacturing fast motion air bearing and linear stages, version “C” adds high horizontal damping to the standard Stabilizer and Damping design elements. Newport horizontal pendulum isolation systems provide superior low-level isolation over friction prone gimbaled and bearing systems. Unique horizontal damping systems dissipate stage motion energy with very little compromise of isolation. |
Releveling and Repositioning Accuracy |
The standard vertical releveling capability on the Heavy Load Isolator Series is ±0.010 in. (±0.25 mm). However, custom designs with releveling accuracy of 0.002 in. (0.05 mm) are available through our Custom Products Group. The horizontal travel is 0.12 in. (3 mm) with a repositioning accuracy of 0.003 in. (0.08 mm). For more precise positioning, a docking system may be required. |
Platform Docking and Other Custom Machinery Requirements |
Many advanced inspection and manufacturing systems require very precise payload positioning during wafer loading/unloading. The Newport OEM Engineering Group offers pressurized docking systems as well as regulated and unregulated gravity docking systems. Diaphragms of varying stiffness and advanced valve designs are used to tune the system to specific machinery needs. These isolators are also available in a variety of custom heights and can be integrated into tubular frame systems. |
Non-Magnetic Designs |
The I-800 Series is built in an aluminum housing and can be modified for applications requiring non-magnetic isolators. Applications include: Nuclear Magnetic Resonance (NMR), superconductor research and other high magnetic field applications. Please contact our Custom Products Group for this capability. |
|
|
|
|
|
|
|
|