DescriptionSpecifications
Models
Catalog PDF
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The GTS30V is the ideal foundation for applications that require long travel vertical motion of horizontally oriented samples. Its low profile and high-precision motion capabilities make this stage an excellent choice for applications such as semiconductor wafer inspection, scanning, automated device alignment, metrology, and quality control.
When combined with our XM (see Ultra-Precision Linear Motor Stages), GTS (see High-precision linear stages), VP (see Precision Compact Linear Stages), ILS (see High-Performance Mid-Range Travel Linear Stages), or IMS (see High-Performance Long-Travel Linear Stages) series of linear stages, the GTS30V is a space-saving alternative to traditional XYZ stacks of stages, and provides unobstructed access to the payload from any side. Furthermore, centering the payload over the bearings, ensures less cantilevering load effects and Abbe induced motion errors.
High-precision vertical motion is achieved using a direct vertical guide system composed of matched pairs of anti-creep crossed roller bearings. Compared to alternative wedge designs, the direct vertical guide technology provides consistently lower and more repeatable runout errors. In addition, the lack of any recirculating elements in the bearings leads to outstanding ripple-free motion required in high-sensitivity focus adjustments. Lastly, the geared retainers prevent bearing cage migration, a problem often found with other linear bearings, especially in vertical arrangements.
A folded DC motor with a precision ground, low-friction lead screw arrangement delivers ultra-smooth motion and does not back drive even at high loads. A reduction belt between the motor and the lead screw increases the available output torque, reduces the servo sensitivity and ensures 100 nm minimum incremental motion with all Newport motion controllers and drivers.
Precision position feedback is provided by an optical scale with 50 nm resolution. Compared to alternative designs featuring a screw mounted rotary encoder, this direct position feedback avoids drive train errors impacting positioning performance, hence leading to superior positioning accuracy and repeatability. |
A compact XYZ assembly consisting of a GTS150 linear stage, a GTS70 linear stage and a GTS30V vertical stage.
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A typical assembly with an ILS250 linear stage, a GTS30V vertical stage and a URS100 rotation stage.
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A typical XYZ assembly with a GTS30V vertical stage and two VP-25XA stages.
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Design Details
| Base Material | High-strength 7075 Aluminum |
| Bearings | Anti-creep crossed roller bearings |
| Drive Mechanism | 6 mm diameter, precision ground lead screw, gravity preloaded nut |
| Drive Screw Pitch (mm) | 1 |
| Feedback | Linear steel scale, 20 µm signal period, 0.05 µm resolution, RS422 differential output |
| Limit Switches | Optical |
| Origin | Optical, located 5 mm from lower position travel limit |
| Motor | DC servo motor UE34CC |
| Cable Length (m) | 3 |
Specifications
| Travel Range (mm) | 30 (-5 /+25 from origin) |
| Resolution (µm) | 0.05 |
| Minimum Incremental Motion (µm) | 0.1 |
| Bi-directional Repeatability (µm) | 0.2 guaranteed |
| On-Axis Accuracy (µm) | 0.5 typical; 1.5 guaranteed |
| Maximum Speed (mm/s) | 10 |
| Straightness, Flatness (µm) | 1.5 guaranteed |
| Pitch, Roll (µrad) | 50 guaranteed |
| MTBF (h) | 20,000 hours at 25% load and with a 30% duty cycle |
| Weight (kg) | 3.3 |
Load Characteristics and Stiffness
| Cz, Normal centered load capacity | 40 N |
| Kαx, Compliance in roll | 40 µrad/Nm |
| Kαy, Compliance in pitch | 40 µrad/Nm |
| Kαz, Compliance in yaw | 25 µrad/Nm |
| Qx, Qy, Off-center load | Q ≤ Cz/(1+D/30) |
| D max, Cantilever distance | 100 mm |