FabFloor™ Semiconductor Equipment Pedestals

FabFloor™ is a new concept for equipment pedestals and semiconductor machinery tool stands. Highly rigid honeycomb panels are used to support precision equipment such as lithography steppers, scanning electron microscopes and profilometry inspection machines. The lightweight panels stand on the Fab subfloor and can be custom designed for specific fabs and machinery.

Lightweight/High Rigidity

Honeycomb’s remarkable rigidity to weight ratio allows you to install an extremely stiff platform at the fraction of the load of a concrete or steel pedestal. The lower weight reduces floor stress and allows prefabrication for lower cost and ease of installation. Combined with the high rigidity, the low weight produces a structure with natural frequencies far above most floor vibrations and well into the machines vibration isolation system’s optimum filtering bandwidth. The high damping properties of Newport’s vertically bonded constrained layer honeycomb core further assists machinery vibration isolation systems by further attenuating floor vibrations.
Newport’s unique trussed honeycomb and triple core interface raises the static stiffness to increase the platforms point load capability and improves its performance as a spreader. This allows the platform to distribute the machines weight across the Fab subfloor. The high dynamic and static rigidity also minimize relative motion between equipment feet to dramatically reduce equipment frame vibration.

Cleanroom Friendly

Prefabricated FabFloors can be delivered clean and do not produce the contamination problems caused by poured concrete. This is especially beneficial during rework of existing cleanrooms where the FabFloor can be installed, removed or relocated with minimum effort. The stainless steel construction offers a further level of low shedding cleanroom compatibility unmatched by concrete pedestal.

Fab Specific Designs

FabFloor can be custom designed for special lengths, widths and shapes. The height of the floor can be built to extend from the fab sub-floor to meet the raised floor of the cleanroom. Special features such as pipe and wire feed throughs, laminar flow and tuned damping can also be incorporated.

Machine Specific Designs

FabFloor can be designed for OEM machinery to account for equipment load, center of gravity and foot locations. Tuned vibration absorbers can be integrated to eliminate specific floor, frame and machinery resonance modes.

Features and Benefits

Specifications