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| FF Series FabFloor™ Semiconductor Equipment Pedestals |
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Tuned vibration absorbers- Laminar flow/perforated core
- Machine specific spreader plates
- Custom dimensions
- Through holes for wires, cables and tubes
- Cleanroom compatible packaging
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Product Description
Product Detail
Specifications
Drawings
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Product Description
FabFloor™ is a new concept for equipment pedestals and semiconductor machinery tool stands. Highly rigid honeycomb panels are used to support precision equipment such as lithography steppers, scanning electron microscopes and profilometry inspection machines. The lightweight panels stand on the Fab subfloor and can be custom designed for specific fabs and machinery.
FabFloor™ is a new concept for equipment pedestals and semiconductor machinery tool stands. Highly rigid honeycomb panels are used to support precision equipment such as lithography steppers, scanning electron microscopes and profilometry inspection machines. The lightweight panels stand on the Fab subfloor and can be custom designed for specific fabs and machinery.
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Ordering Information | | Quantity | Model | Description | Price | | | FF-55-08 | FF Series FabFloor Semiconduct Equipment Pedestals, 1500 x 1500 x 203 mm, 350 kg Weight | | | | FF-55-12 | FF Series FabFloor Semiconduct Equipment Pedestals, 1500 x 1500 x 302 mm, 400 kg Weight | | | | FF-56-08 | FF Series FabFloor Semiconduct Equipment Pedestals, 1500 x 1800 x 203 mm, 420 kg Weight | | | | FF-56-12 | FF Series FabFloor Semiconduct Equipment Pedestals, 1500 x 1800 x 302 mm, 480 kg Weight | | | | FF-66-08 | FF Series FabFloor Semiconduct Equipment Pedestals, 1800 x 1800 x 203 mm, 500 kg Weight | | | | FF-66-12 | FF Series FabFloor Semiconduct Equipment Pedestals, 1800 x 1800 x 302 mm, 575 kg Weight | | | | FF-68-12 | FF Series FabFloor Semiconduct Equipment Pedestals, 1800 x 2400 x 302 mm, 770 kg Weight | | | | FF-88-12 | FF Series FabFloor Semiconduct Equipment Pedestals, 2400 x 2400 x 302 mm, 1025 kg Weight | | | | FF-810-12 | FF Series FabFloor Semiconduct Equipment Pedestals, 2400 x 3000 x 302 mm, 1280 kg Weight | |
| | To order use the following format: | 
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