Product Description
These generic criterion curves have been developed on the basis of data from individual systems and measurements made in facilities both before and after vibration problems had been solved. Moreover, they have been used extensively by leading vibration consultants for the semiconductor manufacturing industry for almost 20 years, and have been extended and refined as the industry has moved to narrower line widths.
The curves take into account that equipment used for the most exacting tasks (such as manufacturing semiconductors with smaller device geometries) is stiffer and better-isolated. It is, however, important to note that these criteria are for guidance only. For example, like any useful and general rule of thumb, the criterion curves are reasonably conservative for some specific cases, especially equipment with well-designed built-in vibration control systems. It should also be noted that these criterion curves do not replace high-resolution narrowband spectrum analysis for diagnostic studies. If a comprehensive study is required, both methods should be used.
These generic criterion curves have been developed on the basis of data from individual systems and measurements made in facilities both before and after vibration problems had been solved. Moreover, they have been used extensively by leading vibration consultants for the semiconductor manufacturing industry for almost 20 years, and have been extended and refined as the industry has moved to narrower line widths.
The curves take into account that equipment used for the most exacting tasks (such as manufacturing semiconductors with smaller device geometries) is stiffer and better-isolated. It is, however, important to note that these criteria are for guidance only. For example, like any useful and general rule of thumb, the criterion curves are reasonably conservative for some specific cases, especially equipment with well-designed built-in vibration control systems. It should also be noted that these criterion curves do not replace high-resolution narrowband spectrum analysis for diagnostic studies. If a comprehensive study is required, both methods should be used.