The CONEX-LDS is a versatile electronic autocollimator with integrated controller used for non-contact alignment or high resolution angular measurements. Using advanced optics and electronics technology with simplified design, the CONEX-LDS offers a high level of reliability for demanding metrology and industrial applications. With convenient features like the integrated controller, eyepiece and mounting accessories, the CONEX-LDS enables quick convenient setups on-site or at the production floor. CONEX-LDS can be interfaced via USB or Ethernet for network communication.
The CONEX-LDS is an ideal tool for:
- Pitch and yaw measurements
- Wobble control
- Rotation stage accuracy measurements
- Settling time and stage damping analysis
- Vibration analysis
- Concentricity alignments of multi-rotational setups
- Rotation axis orthogonality measurements
- Repeatability of XY stages
- Machine alignments
- Surface flatness measurements
- Beam set-up and alignment
SURFACE FLATNESS
This is a classical application for autocollimators. To obtain flatness measurements, the autocollimator beam is reflected off a mirror. By indexing the mirror along the beam path at known distances, linear position vs. the pitch angle is obtained and is used to determine vertical displacement.
BEARING WOBBLE OR ECCENTRICITY MEASUREMENT
In manufacturing environments or metrology applications that utilize dividing heads or rotation stages with mechanical or air bearings, the CONEX-LDS is a very useful tool to verify the wobble of the bearings. In the manufacture of ball, thrust or air bearings, particularly those with large diameters, in-process or final verification of wobble specifications can be accomplished with the CONEX-LDS. In both cases, a simple mirror mounted perpendicular to the rotation axis with the CONEX-LDS beam coincident to it, will provide high precision measurements of wobble that will characterize the condition of the bearing. The results could indicate the need for maintenance, repair or rework. The graph on the right illustrates a typical result of a wobble test of a bearing. Using the same CONEX-LDS setup, but with a precision ball fixture rather than a mirror, it is possible to determine the axial eccentricity of a bearing.
PITCH AND YAW OR YAW AND ROLL MEASUREMENT
Pitch and Yaw deviations during motion increase positioning errors due to the Abbe effect, especially at a longer distance between the sample and the feedback encoder. With the CONEX-LDS autocollimator, this type of error can be accurately identified and used to calculate true position. Pitch and yaw can be measured concurrently using a simple flat mirror. In addition, these angular measurements can be used to derive the flatness and straightness deviations of the linear bearing.
SETTLING TIME AND STAGE DAMPING
The time required for settling into a position is an important parameter in high-accuracy, highthroughput applications like semiconductor inspection. Fast settling times result in processes to be performed very quickly, thus increasing productivity. In this case the CONEX-LDS autocollimator is used to measure the angular displacement at all stage positions, according to the control parameters. The dynamic measurements reflect the stage performance at the given situation. Using Fourier analysis of the same data enables understanding of the stage's resonances.
ROTATION STAGE ACCURACY
Rotation stage accuracy can be measured using a precisely calibrated multifaceted mirror. The CONEX-LDS autocollimator measures the angular difference between the stage rotation and index of the calibrated standard. Absolute accuracy is measured directly, taking the index error and hysteresis into account. The measurement accuracy is better than 1 µrad.
CONEX-LDS Specifications
|
CONEX-LDS
Electronic Autocollimator |
| Source |
Visible laser diode modulated at 5 KHz; circular polarized |
| Wavelength (nm) |
670 |
| Peak Power (mW) |
1 (Class II) |
| Beam Diameter (mm) |
22.5 |
| Beam Divergence (µrad) |
100 |
| Beam Direction (µrad) |
500 |
| Equivalent Focal Length (mm) |
250 |
| Measurement Field (µrad) |
±2000 |
| Ocular Field (mrad) |
±15 (±0.85°) |
| Sensitivity (µrad) |
0.01* |
| Analog Output Rate, Hz |
2000 Hz |
| Sensor Processing Rate, Hz |
5000 |
| Measurement Distortion (µrad) |
±1 (±0.02 x measurement) (i.e. 2%) |
| Reflector |
Min. 2% reflectivity |
| Noise |
0.003 µrad/√ Hz (at 100% reflectivity) |
| Weight (kg) |
1.1 |
| Operating Temperature Range (°C) |
+15 to +25 |
| Storage Temperature Range (°C) |
-10 to + 50 |
* Sensitivity is based on 3σ of noise taken @ 1 Hz
Ordering Information
| | Model | Description | avail raw | Availability | price raw | Price | Qty. MULTI ADD |
|---|
|
CONEX-LDS |
Autocollimator,CONEX-LDS Series, Optical Head with Integrated Controller |
0 |
In Stock |
15850 |
$15,850.00 |
ADD |
|
CONEX-LDS-PS |
The CONEX-LDS-PS is a 90/264 VAC, 50/60 HZ,30VA auto-ranging power supply for the CONEX-LDS Autocollimator. Order with the CONEX-LDS. |
0 |
In Stock |
80 |
$80.00 |
ADD |
|
CONEX-LDS-SL |
Precision Adjustable Two Axis Mount, θxθy, CONEX-LDS Series |
99 |
Call |
975 |
$975.00 |
ADD |
|
CONEX-LDS-SLXY |
Precision Adjustable Four Axis Mount, XYθxθy, CONEX-LDS Series |
0 |
In Stock |
2050 |
$2,050.00 |
ADD |
|
CONEX-USB-RS422 |
The CONEX-LDS embedded controller supports RS-422 communication which can be connected to a computer through USB via the CONEX-USB-RS422 Converter. |
0 |
In Stock |
280 |
$280.00 |
ADD |
|
CONEX-LDS-CABLE5 |
Cable for CONEX-LDS Autocollimator, RS422, 5m |
8 |
8 Weeks |
325 |
$325.00 |
ADD |
|
CONEX-LDS-CABLE20 |
Cable for CONEX-LDS Autocollimator, RS422, 20m |
0 |
In Stock |
450 |
$450.00 |
ADD |
|
CONEX-LDS-VER |
Calibration Verification Kit, CONEX-LDS Autocollimator |
0 |
In Stock |
3100 |
$3,100.00 |
ADD |
The CONEX-LDS comes with a CONEX-LDS-CABLE5 only. The CONEX-PS and CONEX-USB-RS422 must be ordered separately.
