Newport Corporation | Air Bearing Systems

Air Bearing Systems

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DescriptionSpecifications Catalog PDF

Newport's expertise in air bearing technology has resulted in the single and dual axis air bearing platforms. Inherent in these platforms is the use of rigid and stable materials, pressure and vacuum bearing combinations, efficient direct motor drives and direct read linear encoders. Motion control using the XPS or its variants enable the ultimate in automation performance as well as allowing flexible integration with other process devices.

Single Axis Air Bearing Systems

These single axis air bearing systems use a combination of a linear motor and optical linear scale to provide smooth translation and high resolution over a long travel. An aluminum housing encloses the cables and tubes. A separate pneumatic cabinet encloses the air supply conditioning devices and an adjustable safety pressure switch which stops the motion in case of pressure fault. The translation stage and ceramic carriage are mounted to a granite reference. A "light" version, which comes as a table-top bench without the heavy granite stand, is also available.
The high-speed data acquisition (up to 10 kHz) and increased interpolation capability of the XPS controller (see Universal High-Performance Motion Controller/Driver) brings significant improvement for Bragg Grating applications, where resolution is a must. A third-party application software including tuning utilities was developed around the XPS controller platform, thus providing the customer with a turnkey automated workstation.

Specifications of Typical Single Axis Air Bearing System
Travel length (mm)	1000
Load (kg)	10
Linear Encoder	Optical linear scale from Heidenhain Reference LIP581 length 1020 mm Resolution 4 nm Precision class ±1 µm
Max. speed (mm/s)	4
Min. speed (µm/s)	25
Straightness/Flatness (µm)	<5
Dimensions [granite table] (mm)	2000 x 530 x 80
Mass (kg)	350

Dual Axis Air Bearing Systems

Newport's DynamYX^® 300 Dual Axis Air Bearing Stage is a complete sub-micron positioning system designed for easy integration and high throughput in demanding semiconductor equipment test and process applications. It was specifically designed to reach the high level of performance and reliability required by emerging 300 mm wafer equipment.
The DynamYX 300 air bearing system features Silicon Carbide (SiC) moving elements, which freely slide on a precision lapped, granite reference plane using proprietary (pressure/vacuum) air bearing technology. This innovative combination provides an extremely rigid structure that allows the system to make rapid, sub-micron accurate motions with quick settling times.
The DynamYX 300 system features ironless linear motors that minimize the effects of local magnetic fields. In addition, an optical linear glass scale encoder provides a true 2 nm resolution with a ±2 um absolute positioning accuracy and ±10 nm repeatability over the entire 300 mm travel range. The non-contacting encoders eliminate hysteresis and potential contaminant generation.
The standard DynamYX 300 is equipped with a 3-point mounting interface for a wafer chuck. All system cabling is cleanly managed and terminates to a single location. These interface and cable management features can be customized to your specific wafer chuck design without increasing the total footprint of the system or degrading its dynamic performance. An optional granite bridge used for mounting optical measuring instruments and image-processing microscopes can be added to the DynamYX 300 air bearing system.
The DynamYX Platform with its advanced capabilities and features is designed to provide higher system throughput, increased accuracy, and high repeatability at a low cost of ownership.

DynamYX 300 General Specifications
Travel Range (mm)	310 to 420 : X-axis 340 : Y-axis
Footprint [without bridge pillars] (mm)	965 x 815 ( for 310 x 340 travel version ) 1075 x 815 ( for 420 x 340 travel version )
Payload (kg)	5
Y - carriage Mass (kg)	6
X + Y Mass [L Shape + carriage] (kg)	34
Granite Base Thickness (mm)	250
Total Weight (kg)	530
Stiffness, First Natural Frequency [5 kg Payload, 20ms damping time] (Hz)	230

DynamYX GT General Specifications
Travel Range (mm)	380 : X-axis 350 : Y-axis
Footprint [without bridge pillars] (mm)	1040 x 918
Payload (kg)	6
Y-carriage mass (kg)	6
X + Y-mass [L Shape + carriage] (kg)	45
Granite Base Thickness (mm)	250
Total Weight (kg)	590
Stiffness, First Natural Frequency [5 kg Payload, 20ms damping time] (Hz)	250

Overall Performance Specifications
Yaw, Pitch, or Roll ( 300 mm x 300 mm Travel )	< 15 µrad
Straightness & Flatness ( 300 mm circle ) - TIR	0,6 µm
Straightness & Flatness ( 25 mm circle ) - TIR	0,1 µm
XY Othogonality	5 µrad
Maximum Velocity (without causing damage to stage during hard-crash)	400 mm / sec
Acceleration (Peak), DynamYX 300 ( 5 kg Payload )	0.75 G ( X-axis ) 1.5 G ( Y-axis )
Acceleration (RMS), DynamYX 300 (5 kg Payload)	0.25G ( X-axis ) 0.5 G ( Y-axis )
Acceleration (Peak), DynamYX GT ( 6 kg Payload )	1.2 G ( X-axis ) 2.0 G ( Y-axis )
Acceleration (RMS), DynamYX GT ( 6 kg Payload )	0.8 G ( X-axis ) 1.1 G ( Y-axis )
External Dynamic Forces	10 mG ( as exerted by cables ) using cable management
Linear Scale Feedback	Heidenhain LIP 481 R, Zerodur, 2 um signal period, X = up to 420 mm
Resolution (SPS Controller with 20,000 interpolation)	0.1 nm
Accuracy in XY with linear scale ( 300 mm circle ), TIR, without compensation	4 µm
Accuracy in XY with linear scale ( 300 mm circle ), TIR, with linear compensation	2 µm
Accuracy over 30 mm displacement with linear scale, TIR	0.08µm point to point compensation with corrected positions from the host
Accuracy in XY (300mm circle), TIR, with grid calibration, including long term repeatability and air bearing noise (0,1 degree C temperature stability)	0.2 µm point to point compensation with corrected positions from the host
Repeatability in XY(long term) : large or short motion	+/- 50 nm
Repeatability in XY(short term) : large or short motion	+/-10 nm
Speed Stability ( Measured at 2000 Hz Sampling Frequency)	<0.25% up to 400 mm / sec
Speed Stability ( Measured at 200 Hz Sampling Frequency)	<0.1% at up to 400 mm / sec
Step and Settling Times:
300 mm at ±100 nm Stabilization	< 950 msec in X-axis < 850 msec in Y-axis
100 mm at ±100 nm Stabilization	< 450 msec in X-axis < 350 msec in Y-axis
25 mm at ±100 nm Stabilization	< 250 msec in X-axis < 200 msec in Y-axis
600 µm at ±15 nm Stabilization	30 ms in Y-axis

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