Air Bearing Solution Selection Guide

Newport has the knowledge and expertise needed to address the most complex and demanding motion control applications. Whether your application requires the DynamYX® Datum™ capable of 5 G acceleration and nanometer accuracy, the evolutionary HybrYX® air and mechanical bearing “hybrid” stage or the newly released SinguLYS® that combines many of the advanced features of the previous models into a single axis solution, we have an Air Bearing Solution to meet your needs.

Air Bearing Positioning System Specification Comparison

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Air Bearing Positioning Solutions

Model Markets Applications
DynamYX Datum DynamYX® DATUM™ Ultra-High Performance Stage Semiconductor and Microelectronics • Wafer Inspection
• Optical Lithography
• Nano Imprint Lithography
• Memory Repair
CMS-DynamYX Datum 450_A wo Background DynamYX® DATUM™ 450 and 450 GT Ultra-High Performance Air Bearing Stages Semiconductor and Microelectronics 450 mm
• Wafer Inspection
• Optical Lithography
• Nano Imprint Lithography
• Memory Repair
CMS-DYNAMYX_GT-S DynamYX® GT High-Throughput Stage Semiconductor/ Microelectronics • Wafer Inspection
• Optical Lithography
• Nano Imprint Lithography
• Memory Repair
• Wafer Bump Inspection
DynamYX 300 DynamYX® 300 Wafer Positioning Stage • Semiconductor and Microelectronics
• Electro Optics
• Wafer Inspection
• Optical Lithography
• Nano Imprint Lithography
• Memory Repair
• Wafer Bump Inspection
• Wave Guide Direct Writing
• Optical Calibration
DynamYX RS DynamYX® RS Reticle Positioning Stage • Semiconductor and Microelectronics
• Electro Optics
• Reticle Inspection and Repair
• Wave Guide Direct Writing
• Optical Calibration
CMS-DynamYX-Hybrid HybrYX XY Hybrid Air Bearing Stage • Semiconductor and Microelectronics
• Flat Panel Display
• Photovoltaics
• Electro Optics
• Wafer Inspection
• PCB Patterning
• Wafer Bump Inspection
• Automated Optical Inspection
• Array Checking/Repair
• Color Filter Generation
• Edge Isolation
• Scribing
• Fiducial and Barcode Generation
• Wave Guide Direct Writing
• Optical Calibration
CMS-DynamYX G5 Maskless_1 HybrYX™ G5 Large Substrate Positioning Stage • Semiconductor and Microelectronics
• Flat Panel Display
• Photovoltaics
• Electro Optics
• PCB Patterning
• Automated Optical Inspection
• Array Checking
• Array Repair
• Color Filter Generation
• Edge Isolation
• Scribing
• Fiducial and Barcode Generation
• Wave Guide Direct Writing
• Optical Calibration
SinguLYS_S-370 and B1200 SinguLYSTM - Single Axis Air Bearing Stage • Semiconductor and Microelectronics
• Flat Panel Display
• Photovoltaics
• Electro Optics
• Ceramic (SiC) Construction Provides Low Mass, High Rigidity, and Excellent Thermal Stability
• Integrated Pressure-Vacuum Air Bearings and Linear Motor Drive for Clean Operation
• Compact Footprint With Self-Supporting Body and Three-Point Mounting
• Standard Zerodur Linear Encoder provides High Accuracy and Repeatability (steel scale is optional)