General Description
Models
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Model 562-XYZ with SM-13 micrometers (Order micrometers separately)
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562 Series ULTRAlign Linear Stages feature stainless steel construction for superior long-term stability, with thermally matched, hardened steel crossed-roller bearings for unsurpassed performance. The crossed-roller bearings and precision-manufactured bearing reference surfaces provide exceptionally linear travel, with angular deviation better than 100 µrad about any axis. We measure each stage on a six-axis interferometer to ensure performance.
Each 562 stage axis is equipped with a non-influencing locking mechanism to maintain sub-micron positioning when locking or unlocking. Specially designed actuator mounting blocks allow quick and easy actuator changes, on any axis, at any time. Both right and left-handed stages are available for ergonomic actuator placement. And a choice of manual or motorized actuators is available to build a system that meets your specific resolution requirements.
The robust design of the 562 Series Stages makes them ideally suited for repetitive, high-use industrial manufacturing and research applications. These stages have greater thermal immunity due to their higher mass. And larger diameter bearings increase the stiffness of the stage. Oversized loads and complicated platform configurations can easily be accommodated, since all actuators are located below the top surface level. Generous hole patterns, with your choice of English (1/4-20) or Metric (M6) threads, provide convenient mounting options. |
 Preloaded crossed-roller bearings provide repeatable, zero stick-slip linear motion with negligible side-play. The roller strips hold cylindrical rollers alternately inclined 90° to assure constant linear contact with the hardened and ground ways.
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Specifications |
| Maximum Travel X, Z axis [in. (mm)] |
0.5 (13) |
| Maximum Travel Y axis [in. (mm)] |
0.5 (13) |
| Angular Deviation (µrad) |
<100 |
| Load Capacity [lb (N)] |
35 (156) |
| Optical Axis Height [in. (mm)] |
3.875 (98.4) |
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| | Model | Description |
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562-XYZ
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562 ULTRAlign™ Precision Linear Stage, 13mm Travel, Req. 3 Actuators
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562-XYZ-LH
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562 ULTRAlign Precision Linear Stage, 13mm Travel, Req. 3 Actuators, Left Handed
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AJS100-0.5
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AJS High Precision Adjustment Screw, 100 TPI, Small Knob, Side Lock, 12.7mm
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CMA-12CC
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12.5 mm Travel Open-loop DC CMA Actuator
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CMA-12CCCL
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12.5 mm Travel Closed-loop DC Servo CMA Actuator
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CMA-12PP
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12.5 mm Travel Open-loop Stepper CMA Actuator
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DM-13
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Differential Micrometer, 13.0mm Coarse, 0.2mm Fine, 5 lb. Load Capacity
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DM-13L
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Differential Micrometer, Lockable, 13.0mm Coarse, 0.2mm Fine, 11.2 lb Capacity
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HR-13
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High-Resolution Micrometer, 0.5µm Sensitivity, 13mm Travel
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LTA-HS
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Motorized actuator, high speed version, 50 mm travel, 3/8”-40 thread
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M-562-XYZ
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562 ULTRAlign™ Precision Linear Stage, 13mm Travel, Req. 3 Actuators, Metric
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M-562-XYZ-LH
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562 ULTRAlign Precision Linear Stage, 13mm Travel, Req. 3 Actuators, LH, Metric
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PZA12
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NanoPZ Ultra-High Resolution Actuator, 12.5mm Travel
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SM-13
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Vernier Micrometer, 13mm Travel, 9 lb Load Capacity
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